UV- and VIS Filter Coatings by Plasma Assisted Reactive Magnetron Sputtering (PARMS)

نویسندگان

  • M. Scherer
  • J. Pistner
  • W. Lehnert
چکیده

The advantage of PARMS for the manufacturing of high performance low loss coatings is demonstrated with UVand VIS band pass filter based on HfO2 respectively Nb2O5 and SiO2.

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تاریخ انتشار 2010